A macromodel for squeeze-film air damping in the free-molecule regime
نویسندگان
چکیده
منابع مشابه
A Macro Model of Squeeze-Film Air Damping in the Free- Molecule Regime
An accurate macro model for free-molecule squeeze-film air damping on micro plate resonators is present. This model relates air damping directly with device dimensions and operation parameters and therefore provides an efficient tool for the design of high-performance micro resonators. The construction of the macro model is based on Molecular Dynamics (MD) simulations and analytical traveling-t...
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In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce squeeze film air damping from the air in the gap. This damping can cause variations in the cantile...
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An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum gas damping models (Veijola 2004 J. Micromech. Microeng. 14 1109–18, Gallis and Torczynski 2004 J. Microelectromech. Syst. 13 653–9), which were originally derived for a rigid ...
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Air-film damping, which dominates over other losses, plays a significant role in the dynamic response of many micro-fabricated devices with a movable mass suspended by various bearing mechanisms. Modeling the damping characteristics accurately will be greatly helpful to the bearing design, control, and test in various micromotor devices. This paper presents the simulated and experimental squeez...
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Two squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap size and the ambient pressure. Modeling of gas damping has become a subject of increased interest in recent years due to its importance in micro-electro-mechanical systems (MEMS). In addition to the need for gas damping models for design of MEMS with movable micro-structures, knowledge of paramete...
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ژورنال
عنوان ژورنال: Physics of Fluids
سال: 2010
ISSN: 1070-6631,1089-7666
DOI: 10.1063/1.3275844